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- Contact Person : Ms. Chen Sharon
- Company Name : Beijing Logon Sci. & Tech. Deve. Co., Ltd.
- Tel : 86-10-62477220
- Fax : 86-10-62474518
- Address : Beijing,Beijing,Room B-1409, Sigma Plaza, No. 49 Zhichun Road, Haidian District
- Country/Region : China
- Zip : 100086
PVD coating machine
The specification LD-6C20 magnetron sputtering ion vacuum coating equipment
A-Computer automatic control B-switch board manual
Specification and model | LD-6C20(A/B) | Remarks |
Vacuum Chamber Inner Size | ¢800-900×h800-900(mm) | The size can be increased or decreased±10% |
Effective coating space | ¢700-800×h600-700(mm) | The size can be increased or decreased±10% |
Workpiece rotary frame | Revolution+ revolution and rotation | Design according to the specific requirements |
The layout of the rotary frame | The top of Vacuum Chamber downward install | lower , upward install, can instead |
Quantity of the hanging rod | 4 revolution+6-8 revolution and rotation | Can design according to the workpiece quantity |
Rotary speed | 0-5revolutions/minute(rotation)speed governor adjust | variable-frequency governor |
The maximum size of the workpiece | ¢150-170×h550-650(mm)rotation | Hanger quantities and rotation radius |
Application | Decorative coating | |
Workpiece material | Metal, glass, ceramics, plastics etc. | Almost all material |
Film material | TiN, CrN, TiC, TiCN, etc. | Multilayer film, Decorative film |
Requirement of production space | 5×7m | Leave the space of operation and maintenance |
Requirement of capacitance | 50Hz 380V 60KVA | Installed capacity not practical power consumptive |
Requirement of cooling water | more than and equal to 3ton/hour circulating cooling water/ 25°C | |
Pollutant emission | none | None exhaust gas, wastewater, none scrap |
Work noise | less than and equal to 90decibel | |
Vacuum air pump | 2X-70rough pump+2X-30maintain pump | |
Roots pump | ZJP-150 | Can increase |
Diffusion pump | KT-400 | Can replace molecular pump according to the requirement |
Ultimate vacuum | Overmatch 6×10-4 Pa | |
Work vacuum | 6.67×10-3 Pa | |
Exhaust speed | less than 20 minutes(atmosphere—work vacuum) | Normal temperature |
Pressure rising rate(leak rate) | less than and equal to 0.35Pa/h | |
Vacuum chamber material | 304stainless steel | |
Rotary frame material | 6 dynamoelectric striking the arc indirect cooling | When the equipment upgrades option |
Target size | ¢100×40(mm) | Selectable configuration |
Magnetron sputtering target | 2(direct cooling) | |
Sputtering target size | w100-150×h600-700(mm) | |
Grid bias power supply | 20KW 20KHz Inverter power supply | High-end configuration option(Already contains) |
magnetron sputtering power supply | 25KW 40KHz intermediate frequency pulse power source | Two set |
Voltaic arc power supply | 6 0-200A electric current tunable | When the equipment upgrades option |
Vacuum chamber heating power | 15-18KW temperature PID adjust | |
Control mode | Automatic(A) Manually operation(B) | Automatic control type have hand control |
Automatic control system (A) | Industry control computer+ PLC+ LCD+ printer | Can control by touch screen |
PVD coating machine
