- Metal Coating Machinery[10]
- Cleaning Equipment[10]
- Metal Processing Machinery Parts[1]
- Cast & Forged[2]
- Titanium Sheets[1]
- Other Metals & Metal Products[3]
- Other Machinery[7]
- Solar Collectors[5]
- Other Solar Energy Related Products[2]
- Machinery Parts Processing Services[1]
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- Contact Person : Ms. Chen Sharon
- Company Name : Beijing Logon Sci. & Tech. Deve. Co., Ltd.
- Tel : 86-10-62477220
- Fax : 86-10-62474518
- Address : Beijing,Beijing,Room B-1409, Sigma Plaza, No. 49 Zhichun Road, Haidian District
- Country/Region : China
- Zip : 100086
PVD coating machine
The specification of the LD-600 voltaic arc ion vacuum coating equipment
A-Computer automatic control B-switch board manual
Specification and model | LD-600(A/B) | Remarks |
Vacuum Chamber Inner Size | ¢500-800×h500-700(mm) | The size can be increased or decreased±10% |
Effective coating space | ¢400-700×h350-500(mm) | The size can be increased or decreased±10% |
Workpiece rotary frame | Rotation +revolution and rotation | Design according to the specific requirement |
The layout of the rotary frame | The top of Vacuum Chamber downward install | lower , upward install, can instead |
Quantity of the hanging rod | 4 rotation+8 revolution and rotation | Can design according to the workpiece quantity |
Rotary speed | 0-5revolutions/minute(rotation) speed governor adjust | variable-frequency governor |
The maximum size of the workpiece | ¢80-120×h350-500(mm)rotation | Hanger quantities and rotation radius |
Application | tools coating+ decorative coating | |
Workpiece material | Metal ,glass, ceramics etc. | Almost all material |
Film material | TiN, TiAlN, CrN, TiC, TiCN, etc. | Tools film , Multilayer film , Decorative film |
Requirement of production space | 5×7m | Leave the space of operation and maintenance |
Requirement of capacitance | 50Hz 380V 40KVA | Installed capacity not practical power consumptive |
Requirement of cooling water | more than and equal to3ton/hour circulating cooling water/ 25°C | |
Pollutant emission | none | None exhaust gas, wastewater, none scrap |
Work noise | less than and equal to 90decibel | |
Vacuum air pump | 2X-70rough pump+2X-30maintain pump | |
Roots pump | ZJP-150 | Can be increased |
Diffusion pump | KT-400 | Can replace molecular pump according to the requirement |
Ultimate vacuum | Overmatch 6×10-4Pa | |
Work vacuum | 6.67×10-3 Pa | |
Exhaust speed | less than and equal to 20 minutes(atmosphere—work vacuum) | Normal temperature |
Pressure rising rate(leak rate) | less than and equal to 0.35Pa/h | |
Vacuum chamber material | 304 stainless steel | |
Rotary frame material | Carbon steel plating | |
Cathode voltaic arc ion source | 6 dynamoelectric striking the arc indirect cooling | Direct cooling can instead |
Target size | ¢100×40(mm) | |
Grid bias power supply | 20KW 20KHz Inverter power supply | The power can change according to the capacity |
Voltaic arc power supply | 6 0-200A electric current tunable | |
Vacuum chamber heating power | 15-18KW temperature PID adjust | |
Control model | Automatic(A) Manually operation(B) | Automatic control type have hand control |
Automatic control system (A) | Industry control computer+ PLC+ LCD+ printer | Can control by touch screen |
PVD coating machine
